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On-Chip tensile testing of the mechanical and electro-mechanical properties of nano-scale silicon free-standing beams up to fracture
Primary tabs
| Document type | Communication à un colloque (Conference Paper) – Présentation orale avec comité de sélection, Abstract |
|---|---|
| Publication date | 2013 |
| Language | Anglais |
| Conference | "PiezoNEMS 2013 - PHELMA-Polygone", Grenoble, France (11/11/2013) |
| Peer reviewed | yes |
| Host document | "Book of abstracts" |
| Publication status | Publié |
| Affiliations |
UCL
- SST/ICTM/ELEN - Pôle en ingénierie électrique UCL - SST/IMMC/MEMA - Applied mechanics and mathematics UCL - SST/IMMC/IMAP - Materials and process engineering |
| Links |
| Bibliographic reference | Raskin, Jean-Pierre ; Bhaskar, Umesh Kumar ; Pardoen, Thomas. On-Chip tensile testing of the mechanical and electro-mechanical properties of nano-scale silicon free-standing beams up to fracture.PiezoNEMS 2013 - PHELMA-Polygone (Grenoble, France, 11/11/2013). In: Book of abstracts, 2013 |
|---|---|
| Permanent URL | http://hdl.handle.net/2078.1/173413 |