User menu

On-Chip tensile testing of the mechanical and electro-mechanical properties of nano-scale silicon free-standing beams up to fracture

Bibliographic reference Raskin, Jean-Pierre ; Bhaskar, Umesh Kumar ; Pardoen, Thomas. On-Chip tensile testing of the mechanical and electro-mechanical properties of nano-scale silicon free-standing beams up to fracture.PiezoNEMS 2013 - PHELMA-Polygone (Grenoble, France, 11/11/2013). In: Book of abstracts, 2013
Permanent URL http://hdl.handle.net/2078.1/173413