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Displaying 4 results.
    • Speech
    Fabrication and modeling of 3-D self-assembled SOI MEMS controlled by thermal and plastic strains
    Iker, François[UCL] André, Nicolas[UCL] Proost, Joris[UCL] Pardoen, Thomas[UCL] Raskin, Jean-Pierre[UCL] (2005) IEEE MEMS 2005 — Miami, Florida, USA
    • Speech
    Fabrication and modeling of 3-D self-assembled SOI MEMS using plasticity features
    Iker, François[UCL] André, Nicolas[UCL] Proost, Joris[UCL] Pardoen, Thomas[UCL] Raskin, Jean-Pierre[UCL] (2005) 18th IEEE International Conference on MicroElectroMechanical Systems - MEMS 2005 — Miami, Floride, USA
    • Journal article
    Thin films stress extraction using micromachined structures and wafer curvature measurements
    Laconte, J. Iker, François[UCL] Jorez, S. André, Nicolas[UCL] Proost, Joris[UCL] Pardoen, Thomas[UCL] Flandre, Denis[UCL] Raskin, Jean-Pierre[UCL] (2004) Microelectronic Engineering — Vol. 76, no. 1-4, p. 219-226 (2004)
    • Speech
    Thin films stress extraction using micromachined structures and wafer curvature measurements
    Laconte, Jean[UCL] Iker, François[UCL] André, Nicolas[UCL] Pardoen, Thomas[UCL] Proost, Joris[UCL] Flandre, Denis[UCL] Raskin, Jean-Pierre[UCL] (2004) Workshop on advanced microelectronics materials, Materials for Advanced Metallization (MAM 2004) — Brussels (Belgium)