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New On-Chip Nanomechanical Testing Laboratory - Applications to Aluminum and Polysilicon Thin Films
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Document type | Article de périodique (Journal article) – Article de recherche |
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Publication date | 2009 |
Language | Anglais |
Journal information | "IEEE Journal of Microelectromechanical Systems" - Vol. 18, no. 3, p. 555-569 (2009) |
Peer reviewed | yes |
Publisher | Ieee-inst Electrical Electronics Engineers Inc (Piscataway) |
issn | 1057-7157 |
e-issn | 1941-0158 |
Publication status | Publié |
Affiliations |
UCL
- FSA/MAPR - Département des sciences des matériaux et des procédés UCL - FSA/ELEC - Département d'électricité |
Keywords | Mechanical properties ; microelectromechanical systems (MEMS) ; MEMS test structures ; nanomechanical testing ; release ; size effect ; thin materials |
Links |
Bibliographic reference | Gravier, Sebastien ; Coulombier, Michaël ; Safi, Asmahan ; André, Nicolas ; Boe, Alexandre ; et. al. New On-Chip Nanomechanical Testing Laboratory - Applications to Aluminum and Polysilicon Thin Films. In: IEEE Journal of Microelectromechanical Systems, Vol. 18, no. 3, p. 555-569 (2009) |
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Permanent URL | http://hdl.handle.net/2078.1/35546 |