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The Environmental Footprint of IC Production: Review, Analysis and Lessons from Historical Trends
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- 1.64 M
Document type | Article de périodique (Journal article) – Article de recherche |
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Access type | Accès libre |
Publication date | 2023 |
Language | Anglais |
Journal information | "IEEE Transactions on Semiconductor Manufacturing" - Vol. 36, p. 56-67 (2023) |
Peer reviewed | yes |
Publisher | Institute of Electrical and Electronics Engineers (IEEE) |
issn | 0894-6507 |
e-issn | 1558-2345 |
Publication status | Accepté/Sous presse |
Affiliations |
UCL
- SST/ICTM/ELEN - Pôle en ingénierie électrique UCL - SST/IMMC/IMAP - Materials and process engineering |
Links |
Bibliographic reference | Pirson, Thibault ; Delhaye, Thibault P. ; Pip, Alex ; Le Brun, Grégoire ; Raskin, Jean-Pierre ; et. al. The Environmental Footprint of IC Production: Review, Analysis and Lessons from Historical Trends. In: IEEE Transactions on Semiconductor Manufacturing, Vol. 36, p. 56-67 (2023) |
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Permanent URL | http://hdl.handle.net/2078.1/268615 |