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The Environmental Footprint of IC Production: Review, Analysis and Lessons from Historical Trends

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Bibliographic reference Pirson, Thibault ; Delhaye, Thibault P. ; Pip, Alex ; Le Brun, Grégoire ; Raskin, Jean-Pierre ; et. al. The Environmental Footprint of IC Production: Review, Analysis and Lessons from Historical Trends. In: IEEE Transactions on Semiconductor Manufacturing, Vol. 36, p. 56-67 (2023)
Permanent URL http://hdl.handle.net/2078.1/268615