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MEMS filters based on traveling flexural waves

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Houri, Samer [UCL] Raskin, Jean-Pierre [UCL] Francis, Laurent [UCL]

This paper introduces MEMS filters based on the use of traveling flexural waves. The underlying concept of these devices draws on an analogy with SAW devices, while replacing the surface elastic wave with a flexural wave on a suspended beam. This is in contrast with traditional flexural MEMS devices whereby all signal processing is done via a resonating element corresponding to a standing flexural wave. As far as the authors are aware this is the first study regarding traveling flexural wave devices and their frequency domain behavior.

Document type Communication à un colloque (Conference Paper) – Présentation orale avec comité de sélection
Publication date 2010
Language Anglais
Conference "2010 IEEE International Frequency Control Symposium (FCS 2010)", Newport Beach (CA/USA) (du 01/06/2010 au 04/06/2010)
Peer reviewed yes
Host document "proceedings of the 2010 IEEE International Frequency Control Symposium (FCS 2010)"- 151-154 (ISBN : 978-142446399-2)
Publisher IEEE
Publication status Publié
Affiliation UCL - SST/ICTM/ELEN - Pôle en ingénierie électrique
Keywords Flexural wave; Frequency-domain behavior; MEMS filter; MEMS devices; Resonating elements; SAW device; Suspended beams
Links
Bibliographic reference Houri, Samer ; Raskin, Jean-Pierre ; Francis, Laurent. MEMS filters based on traveling flexural waves.2010 IEEE International Frequency Control Symposium (FCS 2010) (Newport Beach (CA/USA), du 01/06/2010 au 04/06/2010). In: proceedings of the 2010 IEEE International Frequency Control Symposium (FCS 2010), IEEE2010, p.151-154
Permanent URL http://hdl.handle.net/2078.1/67348