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MEMS filters based on traveling flexural waves

Bibliographic reference Houri, Samer ; Raskin, Jean-Pierre ; Francis, Laurent. MEMS filters based on traveling flexural waves.2010 IEEE International Frequency Control Symposium (FCS 2010) (Newport Beach (CA/USA), du 01/06/2010 au 04/06/2010). In: proceedings of the 2010 IEEE International Frequency Control Symposium (FCS 2010), IEEE2010, p.151-154
Permanent URL http://hdl.handle.net/2078.1/67348