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Arsenic Dopant Influence Upon the Sintering Behavior of the Aluminum-polysilicon Interface

Bibliographic reference Herbots, N. ; Vandewiele, F. ; Lobet, M. ; Elliman, RG.. Arsenic Dopant Influence Upon the Sintering Behavior of the Aluminum-polysilicon Interface. In: Journal of the Electrochemical Society, Vol. 131, no. 3, p. 645-652 (1984)
Permanent URL http://hdl.handle.net/2078.1/56132