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A generic “micro-Stoney” method for the measurement of internal stress and elastic modulus of ultrathin films

Bibliographic reference Favache, Audrey ; Ryelandt, Sophie ; Melchior, Maxime ; Zeb, Gul ; Carbonnelle, Pierre ; et. al. A generic “micro-Stoney” method for the measurement of internal stress and elastic modulus of ultrathin films. In: Review of Scientific Instruments, Vol. 87, no.1, p. 015002 (2016)
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