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Development and characterization of microsystems in thin film SOI technology

Bibliographic reference Iker, François ; Raskin, Jean-Pierre. Development and characterization of microsystems in thin film SOI technology.Union Radio-Scientifique Internationale (U.R.S.I.) (Brussels, Belgium, 13/12/2002). In: Proceedings of the Union Radio-Scientifique Internationale (U.R.S.I.), 2002, p. 1 page
Permanent URL http://hdl.handle.net/2078.1/122609