Low-Wavelengths SOI CMOS Photosensors for Biomedial Applications

Bulteel, Olivier [UCL] Van Overstraeten, Nancy [UCL] Afzalian, Aryan [UCL] Dupuis, Pascal [UCL] Jeumont, Sabine [UCL] Irenge Mwana Wa Bene, Léonid [UCL] Ambroise, Jérôme [UCL] Macq, Benoît [UCL] Gala, Jean-Luc [UCL] Flandre, Denis [UCL]

(eng) INTRODUCTION : Biological agents may be characterized (in terms of quantity (or concentration), purity, nature) using optical ways like spectrometry, fluorometry and real-time PCR for example. Most of these techniques are based on absorbance or fluorescence. Indeed, many biological molecules can absorb the light when excited at wavelengths close to blue and ultraviolet (UV). For example, DNA, RNA and proteins feature an absorption peak in the deep UV, more precisely around 260 and 280 nm (Karczemska & Sokolowska, 2001). This work is widely focused on those wavelengths. A biological sample concentration measurement method can be based on UV light absorbance or transmittance, as already known and realized with high-cost and large-size biomedical apparatus. But, often, the difficulties come from the limitation for measuring very small concentrations (close to a few ng/µL or lower) since the measurement of such small light intensity variations at those low wavelengths requires a precise light source, and very efficient photodetectors. Reducing the dimensions of such a characterization system further requires a small light source, a miniaturized photosensor and a processing system with high precision to reduce the measurement variations. Some light-emitting diodes (LED) performing at those UV wavelengths have recently appeared and may be used to implement the light source. Concerning the optical sensor, while accurate but high-cost photosensors in technologies such as AlGaN and SiC provide high sensitivities in UV low wavelengths thanks to their semiconductor bandgap (Yotter & Wilson, 2003), the silicon-on-insulator (SOI) layers absorb the photons in that specific range thanks to an appropriate thickness of the silicon. Adding excellent performances of low power consumption, good temperature behavior and high speed (Flandre et al., 1999; 2001), the SOI technology allows the designers for integrating a specific signal processing integrated CMOS circuit to transform the photocurrent into a digital signal for example. This opens the possibility to build a low-cost, complete and portable microsystem, including the light source, the photodetector and a recipient for the sample to characterize […]