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Behaviour of CPW and TFMS lines at high temperature for RF applications in sub-45 nm nodes
Roda Neve, Cesar
[UCL]
Farcy, A.
Gallitre, M.
Blampey, B.
Meuris, P.
[UCL]
Arnaud, L.
Raskin, Jean-Pierre
[UCL]
(2010)
18th European Workshop on Materials for Advanced Metallization — Grenoble(France)