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All Publications

Displaying 10 results.
    • Journal article
    TEM Characterization of Polysilicon and Silicide Fin Fabrication Processes of FinFETs
    Ratajczak, J. Laszcz, A. Czerwinski, A. Katcki, J. Tang, Xiaohui[UCL] Reckinger, Nicolas[UCL] Yarekha, N. Larrieu, Guillaume Dubois, Emmanuel (2009) Acta Physica Polonica. Series A: General Physics, Physics of Condensed Matter, Optics and Quantum Electronics, Atomic and Molecular Physics, Applied Physics — Vol. 116, no.98, p. 89-91 (2009)