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Sputtering soft materials with molecular projectiles: A microscopic view

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Bibliographic reference Delcorte, Arnaud ; Garrison, B.J. ; Hamraoui, K.. Sputtering soft materials with molecular projectiles: A microscopic view. In: Surface and Interface Analysis, Vol. 43, p. 16–19 (2011)
Permanent URL http://hdl.handle.net/2078.1/95086