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Fabrication and characterization of High Resistivity SOI wafers for RF applications

Bibliographic reference Lederer, Dimitri ; Roda Neve, Cesar ; Raskin, Jean-Pierre. Fabrication and characterization of High Resistivity SOI wafers for RF applications.214th Meeting of The Electrochemical Society (ECS) - 10th International Symposium on Semiconductor Wafer Bonding: Science, Technology and Applications (Honolulu, Hawai, USA, du 12/10/2008 au 17/10/2008). In: Proceedings of the 214th Meeting of The Electrochemical Society (ECS) - 10th International Symposium on Semiconductor Wafer Bonding: Science, Technology and Applications, 2008, p. Paper 2173
Permanent URL http://hdl.handle.net/2078.1/91588