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Low-power/high-temperature sensors and MEMS in SOI technology

Bibliographic reference Moreno Hagelsieb, Luis ; Tang, Xiaohui ; Bulteel, Olivier ; Nizzet, Y. ; André, Nicolas ; et. al. Low-power/high-temperature sensors and MEMS in SOI technology.2010 NSTI Nanotechnology Conference and Expo (NSTI-Nanotech 2010) (Anaheim (CA/USA), du 21/06/2010 au 24/06/2010). In: Technical Proceedings of the 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010, 2010, p.165-168
Permanent URL http://hdl.handle.net/2078.1/91471