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Self-aligned single-electron memory fabrication based on Si/SiGe/Si heterostructures

Bibliographic reference Tang, Xiaohui ; Ravau, F. ; Dubois, E. ; Kasper, E. ; Karmous, A. ; et. al. Self-aligned single-electron memory fabrication based on Si/SiGe/Si heterostructures.35th International Conference on Micro & Nano Engineering – MNE’09 (Ghent (Belgium), du 28/09/2009 au 01/10/2009). In: Proceedings of the 35th International Conference on Micro & Nano Engineering – MNE’09, 2009, p. paper P-NANO-60
Permanent URL http://hdl.handle.net/2078.1/91394