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Fabrication of SOI-based nano-biosensors

Bibliographic reference Tang, Xiaohui ; Raskin, Jean-Pierre ; Jonas, Alain M. ; Nysten, Bernard ; Demoustier-Champagne, Sophie ; et. al. Fabrication of SOI-based nano-biosensors.35th International Conference on Micro & Nano Engineering (MNE) (Ghent (Belgium), du 28/09/2009 au 01/10/2009). In: Proceedings of the 35th International Conference on Micro & Nano Engineering (MNE), 2009
Permanent URL http://hdl.handle.net/2078.1/90409