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Development of Micro- and Nano- Bio- and Environmental SOI-Sensors

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Authors :
Document type : Communication à un colloque (Conference Paper) – Présentation orale avec comité de sélection
Publication date : 2008
Language : Anglais
Conference : "Workshop on MEMS and Nanotechnology through Science and Applications", UCL/Louvain-la-Neuve (Belgium) (18/03/2008)
Peer reviewed : yes
Host document : "Proceedings of the Workshop on MEMS and Nanotechnology through Science and Applications"
Affiliation : UCL - FSA/ELEC - Département d'électricité
Keywords : SOI-sensors
Links :
Bibliographic reference Moreno Hagelsieb, Luis ; Pampin, Rémi ; Bulteel, Olivier ; Olbrechts, Benoit ; André, Nicolas ; et. al. Development of Micro- and Nano- Bio- and Environmental SOI-Sensors.Workshop on MEMS and Nanotechnology through Science and Applications (UCL/Louvain-la-Neuve (Belgium), 18/03/2008). In: Proceedings of the Workshop on MEMS and Nanotechnology through Science and Applications, 2008
Permanent URL http://hdl.handle.net/2078.1/90320