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3-D CMOS compatible MEMS sensors and actuators

Bibliographic reference André, Nicolas ; Sobieski, Stanislas ; Renaux, Christian ; Flandre, Denis ; Raskin, Jean-Pierre. 3-D CMOS compatible MEMS sensors and actuators.Workshop on MEMS and Nanotechnology through Science and Applications (UCL/Louvain-la-Neuve (Belgium), 18/03/2008). In: proceedings of the Workshop on MEMS and Nanotechnology through Science and Applications, 2008
Permanent URL http://hdl.handle.net/2078.1/90319