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True Silicon-On-Nothing MOSFETs fabricated by Si layer transfer over a pre-etched cavity

Bibliographic reference Kilchytska, Valeriya ; Chung, M. ; Vovk, Ya.N. ; Raskin, Jean-Pierre ; Flandre, Denis. True Silicon-On-Nothing MOSFETs fabricated by Si layer transfer over a pre-etched cavity.Third Workshop of the Thematic Network on Silicon on Insulator technology, devices and circuits (EUROSOI 2007) (Leuven, Belgium, du 24/01/2007 au 26/01/2007). In: Proceedings of EUROSOI 2007, Third Workshop of the Thematic Network on Silicon on Insulator technology, devices and circuits, 2007
Permanent URL http://hdl.handle.net/2078.1/90271