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Electrical characterization of FinFETs: Special aspects

Bibliographic reference Kilchytska, Valeriya ; Rudenko, Tamara ; Flandre, Denis. Electrical characterization of FinFETs: Special aspects.7th Symposium Diagnostics & Yield: Advanced Silicon Devices and Technologies for ULSI Era (Warszawa (Poland), du 26/06/2006 au 28/06/2006). In: Proceedings of the 7th Symposium Diagnostics & Yield: Advanced Silicon Devices and Technologies for ULSI Era, 2006
Permanent URL http://hdl.handle.net/2078.1/90080