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Artificial microbeams to sense air flow, temperature or humidity combining MEMS and CMOS technologies

Bibliographic reference André, Nicolas ; Rue, Bertrand ; Renaux, Christian ; Raskin, Jean-Pierre ; Flandre, Denis. Artificial microbeams to sense air flow, temperature or humidity combining MEMS and CMOS technologies.Sensors and Sensing in Biology and Engineering Conference, October 12 – 16, 2008 (Cetraro (Italy), du 12/10/2008 au 16/10/2008).
Permanent URL http://hdl.handle.net/2078.1/89933