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Planar Double-Gate SOI MOS devices by wafer bonding over pre-patterned cavities

Bibliographic reference Chung, Tsung Ming ; Olbrechts, Benoit ; Flandre, Denis ; Södervall, U. ; Bengtsson, S. ; et. al. Planar Double-Gate SOI MOS devices by wafer bonding over pre-patterned cavities. In: Solid-State Electronics, Vol. 51, no. 2, p. 231-238 (2007)
Permanent URL http://hdl.handle.net/2078.1/89444