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Advances in Electrochemical Micromachining of Silicon:Towards MEMS Fabrication

Bibliographic reference Bassu, Margherita ; Strambini, Lucanos Marsilio ; Barillaro, Giuseppe. Advances in Electrochemical Micromachining of Silicon:Towards MEMS Fabrication.Proceedings of EUROSENSORS XXV (Athènes (Grèce), du 04/09/2011 au 07/09/2011).
Permanent URL http://hdl.handle.net/2078.1/87767