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Contactless monitoring of Si substrate permittivity and resistivity from microwave to millimeter-wave frequencies

Bibliographic reference Elhawil, A. ; Roda Neve, Cesar ; Olbrechts, Benoit ; Huynen, Isabelle ; Raskin, Jean-Pierre ; et. al. Contactless monitoring of Si substrate permittivity and resistivity from microwave to millimeter-wave frequencies. In: Microwave & Optical Technology Letters, Vol. 52, no. 11, pp. 2500-2505 (November 2010)
Permanent URL http://hdl.handle.net/2078.1/87127
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