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Ultra Low Power flow-to-frequency SOI MEMS transducer

Bibliographic reference André, Nicolas ; Rue, Bertrand ; Van Vynckt, D. ; Francis, Laurent ; Flandre, Denis ; et. al. Ultra Low Power flow-to-frequency SOI MEMS transducer. In: Procedia Engineering, Vol. 5, p. 540-543 (2010)
Permanent URL http://hdl.handle.net/2078.1/87125