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Routes towards novel active pressure sensors in SOI technology

Bibliographic reference Olbrechts, Benoit ; Rue, Bertrand ; Pardoen, Thomas ; Flandre, Denis ; Raskin, Jean-Pierre. Routes towards novel active pressure sensors in SOI technology. In: Advanced Materials Research, Vol. 276, no. -, pp. 145-155 (July 2011)
Permanent URL http://hdl.handle.net/2078.1/87113