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Amorphous silicon-carbon alloy films as a functional material for MEMS technologies

Bibliographic reference Vasin, A.V. ; Rusavsky, A.V. ; Kysenko, V.S. ; Nazarov, A.N. ; Ishikawa, Yu ; et. al. Amorphous silicon-carbon alloy films as a functional material for MEMS technologies.6th International SemOI Conference and 1st Ukrainian-French Seminar “Semiconductor-on-Insulator materials, devices and circuits: physics, technology and diagnostics” (Kyiv, Ukraine, du 25/10/2010 au 28/10/2010). In: Proceedings of the 6th International SemOI Conference and 1st Ukrainian-French Seminar “Semiconductor-on-Insulator materials, devices and circuits: physics, technology and diagnostics”, 2010, p. 20
Permanent URL http://hdl.handle.net/2078.1/87073