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Local strain characterization of MEMS-based silicon beams by Raman spectroscopy

Bibliographic reference Urena, F. ; Olsen, S. ; Escobedo-Cousin, E. ; Siller, S. ; Bhaskar, Umesh Kumar ; et. al. Local strain characterization of MEMS-based silicon beams by Raman spectroscopy.Electronic Materials Conference - EMC 2011 (Santa Barbara, CA, USA, du 22/06/2011 au 24/06/2011). In: Proceedings of the Electronic Materials Conference - EMC 2011, 2011
Permanent URL http://hdl.handle.net/2078.1/86636