User menu

Wafer bonding techniques for DG MOSFET fabrication

Bibliographic reference Olbrechts, Benoit ; Södervall, U. ; Bengtsson, S. ; Raskin, Jean-Pierre. Wafer bonding techniques for DG MOSFET fabrication. In: ECS Transactions, Vol. 3, no. 6, p. 47-58 (2006)
Permanent URL http://hdl.handle.net/2078.1/85701