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Fabrication and Characterization of High Resistivity SOI Wafers for RF Applications

Bibliographic reference Lederer, Dimitri ; Roda Neve, Cesar ; Olbrechts, Benoit ; Raskin, Jean-Pierre. Fabrication and Characterization of High Resistivity SOI Wafers for RF Applications. In: ECS Transactions, Vol. 16, no. 8, p. 165-174 (2008)
Permanent URL http://hdl.handle.net/2078.1/85671