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Study of the Plasma-Polyethylene Interactions in the Case of SF6 and SF6-CF4 Non-Equilibrium Discharges

Bibliographic reference Khairallah-Abdelnour, Y ; Arefi-Khonsari, Farzi ; Amouroux, Jacques ; Léonard, Didier ; Bertrand, Patrick. Study of the Plasma-Polyethylene Interactions in the Case of SF6 and SF6-CF4 Non-Equilibrium Discharges.12th International Symposium on Plasma Chemistry ISPC 12 (Minneapolis MN - USA, du 21/08/1995 au 25/08/1995). In: J.V. Heberlein, D.W. Ernie, J. T. Roberts, Proceedings of the 12th International Symposium on Plasma Chemistry ISPC 12, Univ. of Minnesota1995, p. 117-122
Permanent URL http://hdl.handle.net/2078.1/84141