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Deph profiling on Ta2O5 thin layer on Ta foil by ion scattering spectrometry
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Document type | Contribution à ouvrage collectif (Book Chapter) |
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Publication date | 1988 |
Language | Anglais |
Host document | R. Kelly and M. Fernanda da Silva ; "Materials Modifications by High-fluence Ion Beams"- p. 101-109 (ISBN : 0-7923-0035-1) |
Collection | NATO-ASI serie E: Applied Sciences - - Vol. 155 |
Edition statement | |
Publisher | Kluwer Academic Publishers |
Publication status | Publié |
Affiliation | UCL - FSA/MAPR - Département des sciences des matériaux et des procédés |
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Bibliographic reference | Rummens, F. ; Bertrand, Patrick ; De Puydt, Yves. Deph profiling on Ta2O5 thin layer on Ta foil by ion scattering spectrometry. In: R. Kelly and M. Fernanda da Silva, Materials Modifications by High-fluence Ion Beams, Kluwer Academic Publishers 1988, p. 101-109 |
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Permanent URL | http://hdl.handle.net/2078/83563 |