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Bulk and surface micromachined SOI MEMS: from sensors to testing micromachines

Bibliographic reference Raskin, Jean-Pierre ; Iker, F. ; Andre, N. ; Olbrecht, B. ; Fabregue, D. ; et. al. Bulk and surface micromachined SOI MEMS: from sensors to testing micromachines.4th International Society of Electrochemistry (ISE) Spring Meeting 2006 (Singapore, du 17/04/2006 au 20/04/2006). In: Proceedings of the 4th International Society of Electrochemistry (ISE) Spring Meeting 2006, 2006, p. 63
Permanent URL http://hdl.handle.net/2078.1/78965