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Nanomechanical testing of free-standing monocrystalline silicon beams

Bibliographic reference Bhaskar, Umesh Kumar ; Houri, Samer ; Passi, Vikram ; Pardoen, Thomas ; Raskin, Jean-Pierre. Nanomechanical testing of free-standing monocrystalline silicon beams.219th ECS Meeting - Symposium E8 - Advanced Semiconductor-on-Insulator Technology and Related Physics (Montreal, Canada, du 01/05/2001 au 06/05/2011). In: Proceedings of the 219th ECS Meeting, 2011, p. paper #1446
Permanent URL http://hdl.handle.net/2078.1/78196