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RF magnetron-sputtering deposition of pyroelectric lithium tantalate thin films on ruthenium dioxide

Bibliographic reference Combette, Philippe ; Nougaret, Laurianne ; Giani, Alain ; Pascal-delannoy, Frederique. RF magnetron-sputtering deposition of pyroelectric lithium tantalate thin films on ruthenium dioxide . In: Journal of crystal growth, Vol. 304, no. 1, p. 90-96 (2007)
Permanent URL http://hdl.handle.net/2078.1/77654