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New concept of multipurpose on-chip nanomechanical laboratory

Bibliographic reference Coulombier, Michaël ; Gravier, Sébastien ; Pardoen, Thomas ; Fabrègue, Damien ; André, Nicolas ; et. al. New concept of multipurpose on-chip nanomechanical laboratory.1st International Congress and Exhibition on Microreliability and Nanoreliability in Key Technology Applications - MicroNanoReliability 2007 (Berlin, Germany, du 02/09/2007 au 05/09/2007). In: Proceedings of the 1st International Congress and Exhibition on Microreliability and Nanoreliability in Key Technology Applications - MicroNanoReliability 2007, 2007
Permanent URL http://hdl.handle.net/2078.1/76881