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A new on chip nanomechanical testing method

Bibliographic reference Pardoen, Thomas ; Safi, Asmahan ; Houri, Samer ; Coulombier, Michaël ; Gravier, Sébastien ; et. al. A new on chip nanomechanical testing method.Observatory for Micro & NanoTechnologies - Nanomechanics for NEMS: scientific and technological issues (Grenoble, France, du 26/06/2008 au 27/06/2008). In: Proceedings of the Observatory for Micro & NanoTechnologies - Nanomechanics for NEMS: scientific and technological issues, 2008
Permanent URL http://hdl.handle.net/2078.1/76879