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Steady-state measurement and modelling of wafer bonding failure resistance

Bibliographic reference Bertholet, Y. ; Iker, François ; Raskin, Jean-Pierre ; Pardoen, Thomas. Steady-state measurement and modelling of wafer bonding failure resistance.16th European Conference on Solid-State Transducers (Prague, Czech Republic, du 15/09/2002 au 18/09/2002). In: Proceedings of the 16th European Conference on Solid-State Transducers, 2002, p. 1 page
Permanent URL http://hdl.handle.net/2078.1/76776