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Steady state measurement of wafer bonding fracture resistance

Bibliographic reference Bertholet, Y. ; Iker, F. ; Raskin, Jean-Pierre ; Pardoen, Thomas. Steady state measurement of wafer bonding fracture resistance.Eurosensors XVI, The 16th European Conference on Solid-State Transducers (Prague, du 15/09/2002 au 18/09/2002). In: Proceedings of the 16th European Conference on Solid-State Transducers, 2002
Permanent URL http://hdl.handle.net/2078.1/76774