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Steady-state measurement of the interface fracture resistance in wafer bonding

Bibliographic reference Bertholet, Yannick ; Iker, François ; Zhang, Xuan Xiong ; Raskin, Jean-Pierre ; Pardoen, Thomas. Steady-state measurement of the interface fracture resistance in wafer bonding.15th European Conference of Fracture (Stockholm, Sweden, August 2004). In: Proceedings of the 15th European Conference of Fracture, 2004
Permanent URL http://hdl.handle.net/2078.1/76772