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Fracture resistance of interfaces in bonded silicon wafers

Bibliographic reference Bertholet, Y. ; Iker, François ; Zhang, Xuan Xiong ; Raskin, Jean-Pierre ; Pardoen, Thomas. Fracture resistance of interfaces in bonded silicon wafers.15th European Conference of Fracture (Stockholm, Sweden, du 11/08/2004 au 13/08/2004). In: Proceedings of the 15th European Conference of Fracture, 2004, p. Paper ECF15, 9 pages
Permanent URL http://hdl.handle.net/2078.1/76769