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CMOS compatible 2-D self-assembled MEMS in thin film SOI technology

Bibliographic reference Iker, François ; Si Moussa, Mehdi ; André, Nicolas ; Pardoen, Thomas ; Raskin, Jean-Pierre. CMOS compatible 2-D self-assembled MEMS in thin film SOI technology.Union Radio-Scientifique Internationale (U.R.S.I.) (Brussels, Belgium, December 10). In: Proceedings, 2004, p. 66
Permanent URL http://hdl.handle.net/2078.1/76767