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Fabrication and modeling of 3-D self-assembled SOI MEMS controlled by thermal and plastic strains

Bibliographic reference Iker, François ; André, Nicolas ; Proost, Joris ; Pardoen, Thomas ; Raskin, Jean-Pierre. Fabrication and modeling of 3-D self-assembled SOI MEMS controlled by thermal and plastic strains.IEEE MEMS 2005 (Miami, Florida, USA, du 29/01/2005 au 03/02/2005). In: Proceedings of MEMS 2005, 2005, p. 459-462
Permanent URL http://hdl.handle.net/2078.1/76616