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New internal stress driven micromachines for measuring the mechanical properties of thin films

Bibliographic reference Fabrègue, Damien ; André, Nicolas ; Pardoen, Thomas ; Raskin, Jean-Pierre ; Coulombier, Michaël. New internal stress driven micromachines for measuring the mechanical properties of thin films.International Symposium on Design, Test, Integration and Packaging of MEMS / MOEMS (Stresa, Lago Maggiore, Italy, du 24/04/2006 au 28/04/2006). In: Proceedings of the DTIP 2006 , 2006, p. 189-194
Permanent URL http://hdl.handle.net/2078.1/76606