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MEMS microstructures for the nanomechanical characterization of thin films

Bibliographic reference Mazzoni-Leduc, L. ; Pardoen, Thomas ; Massart, T.J.. MEMS microstructures for the nanomechanical characterization of thin films.8th. World Congress on Computational Mechanics (WCCM8) & 5th. European Congress on Computational Methods in Applied Sciences and Engineering (ECCOMAS 2008) (Venise, Italie, du 30/06/2008 au 05/07/2008). In: Proceedings of 8th. World Congress on Computational Mechanics (WCCM8) & 5th. European Congress on Computational Methods in Applied Sciences and Engineering (ECCOMAS 2008), 2008
Permanent URL http://hdl.handle.net/2078.1/76594