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MEMS microstructures for the nanomechanical characterization of thin films

Bibliographic reference Boé, A. ; Safi, A. ; Coulombier, Michaël ; Pardoen, Thomas ; Raskin, Jean-Pierre. MEMS microstructures for the nanomechanical characterization of thin films.International Conference on Multifunctional Materials and Structures (Hong-Kong, Chine, du 28/07/2008 au 31/07/2008). In: Proceedings of the International Conference on Multifunctional Materials and Structures, 2008, p. paper # MF382
Permanent URL http://hdl.handle.net/2078.1/76593