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On-chip testing laboratory for nanomechanical characterization of thin films

Bibliographic reference Boé, A. ; Coulombier, Michaël ; Safi, A. ; Pardoen, Thomas ; Raskin, Jean-Pierre. On-chip testing laboratory for nanomechanical characterization of thin films.the 2009 SEM Annual Conference and Exposition on Experimental and Applied Mechanics (Albuquerque, NM USA, du 01/06/2009 au 04/06/2009). In: Proceedings of the 2009 SEM Annual Conference and Exposition on Experimental and Applied Mechanics, Society for Experimental Mechanics Inc. ed(s)2009, p. -
Permanent URL http://hdl.handle.net/2078.1/76366