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Characterising the effect of uniaxial strain on the surface roughness of Si nanowire MEMS-based microstructures

Bibliographic reference Escobedo-Cousin, E. ; Raskin, Jean-Pierre ; Bhaskar, Umesh Kumar ; Pardoen, Thomas ; Olsen, S.. Characterising the effect of uniaxial strain on the surface roughness of Si nanowire MEMS-based microstructures.2010 Materials Research Society Fall Meeting - MRS Fall'10 (Boston, MA, USA, du 29/11/2010 au 03/12/2010). In: Proceedings of the 2010 Materials Research Society Fall Meeting, 2010, p. Paper # S3.4.
Permanent URL http://hdl.handle.net/2078.1/76205