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TEM characterization of freestanding metallic thin films deformed by controlled on chip internal stress

Bibliographic reference Wang, B. ; Idrissi, H. ; Colla, Marie-Stéphane ; Coulombier, Michaël ; Raskin, Jean-Pierre ; et. al. TEM characterization of freestanding metallic thin films deformed by controlled on chip internal stress.17th International Microscopy Congress - IMC17 (Rio de Janeiro, Brazil, du 19/09/2010 au 24/09/2010). In: Proceedings of the 17th International Microscopy Congress - IMC17, 2010, p. paper M12505
Permanent URL http://hdl.handle.net/2078.1/75753